Planning a Wafer Heater Project From Requirements to Final Testing

https://advanced-heating-guide.novacrestiq.com/posts/what-to-consider-before-installing-a-mica-heater

In wafer heating chucks, a wafer heater must deliver heat in a controlled way. It uses a controlled heating assembly designed to warm a wafer support or chuck. One useful trait is multi-zone control. Still, sensor offset can change the result